JPH0431043B2 - - Google Patents

Info

Publication number
JPH0431043B2
JPH0431043B2 JP59227638A JP22763884A JPH0431043B2 JP H0431043 B2 JPH0431043 B2 JP H0431043B2 JP 59227638 A JP59227638 A JP 59227638A JP 22763884 A JP22763884 A JP 22763884A JP H0431043 B2 JPH0431043 B2 JP H0431043B2
Authority
JP
Japan
Prior art keywords
wavefront
polarizer
measurement
interference pattern
converting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59227638A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60123704A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS60123704A publication Critical patent/JPS60123704A/ja
Publication of JPH0431043B2 publication Critical patent/JPH0431043B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP59227638A 1983-11-03 1984-10-29 光学干渉計システムとその使用方法 Granted JPS60123704A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US548248 1983-11-03
US06/548,248 US4606638A (en) 1983-11-03 1983-11-03 Distance measuring interferometer and method of use

Publications (2)

Publication Number Publication Date
JPS60123704A JPS60123704A (ja) 1985-07-02
JPH0431043B2 true JPH0431043B2 (en]) 1992-05-25

Family

ID=24188012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59227638A Granted JPS60123704A (ja) 1983-11-03 1984-10-29 光学干渉計システムとその使用方法

Country Status (3)

Country Link
US (1) US4606638A (en])
EP (1) EP0145836A3 (en])
JP (1) JPS60123704A (en])

Families Citing this family (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4880992A (en) * 1987-10-08 1989-11-14 Siemens Aktiengesellschaft Non-contacting measuring system for precision characteristics, particularly of industrial robots
US4989980A (en) * 1989-03-02 1991-02-05 Honeywell Inc. Method and apparatus for measuring coefficient of thermal expansion
US5121987A (en) * 1989-03-02 1992-06-16 Honeywell Inc. Method and apparatus for measuring coefficient of thermal expansion
US5008556A (en) * 1989-07-24 1991-04-16 Becton, Dickinson And Company Measuring a gap between a tube and a float
JP2533664B2 (ja) * 1990-01-17 1996-09-11 株式会社日立製作所 磁気記録装置
US5218424A (en) * 1991-03-19 1993-06-08 Zygo Corporation Flying height and topography measuring interferometer
US5374991A (en) * 1991-03-29 1994-12-20 Gradient Lens Corporation Compact distance measuring interferometer
US5327216A (en) * 1992-09-18 1994-07-05 Shell Oil Company Apparatus for remote seismic sensing of array signals using side-by-side retroreflectors
US5317383A (en) * 1992-09-18 1994-05-31 Shell Oil Company Array retroreflector apparatus for remote seismic sensing
US5289434A (en) * 1992-09-18 1994-02-22 Shell Oil Company Retroreflector apparatus for remote seismic sensing
US5430537A (en) * 1993-09-03 1995-07-04 Dynamics Research Corporation Light beam distance encoder
US5473434A (en) * 1994-05-16 1995-12-05 Zygo Corporation Phase shifting interferometer and method for surface topography measurement
US5457395A (en) * 1994-07-18 1995-10-10 Ford Motor Company System and apparatus for measuring gaps between non-parallel surfaces
US5600441A (en) * 1995-01-31 1997-02-04 Zygo Corporation Interferometer and method for measuring the distance of an object surface with respect to the surface of a rotating disk
US5557399A (en) * 1995-03-22 1996-09-17 Zygo Corporation Optical gap measuring apparatus and method
CN1131741A (zh) * 1995-03-22 1996-09-25 载歌公司 光学间隙测量装置和方法
US5953125A (en) * 1995-09-01 1999-09-14 Zygo Corporation Optical gap measuring apparatus and method
US5831733A (en) * 1996-02-28 1998-11-03 Zygo Corporation Apparatus and methods for measuring gaps while compensating for birefringence effects in the measurement path
US5644562A (en) * 1996-02-28 1997-07-01 Zygo Corporation Method and apparatus for measuring and compensating birefringence in rotating disks
DE69727376D1 (de) * 1996-05-31 2004-03-04 Tropel Corp Interferometer zur dickevariationsmessung von halbleitersubstraten
US20030145353A1 (en) * 1997-05-07 2003-07-31 Lightner Jonathan E. Starch biosynthetic enzymes
DE19962078B4 (de) * 1998-12-23 2010-03-18 CiS Institut für Mikrosensorik gGmbH Verfahren und Vorrichtung zur interferentiellen Abstandsmessung
US6271924B1 (en) 1998-12-29 2001-08-07 Bryan Kok Ann Ngoi Noncontact acoustic optic scanning laser vibrometer for determining the difference between an object and a reference surface
US6184993B1 (en) * 1999-02-09 2001-02-06 Phase Metrics, Inc. Apparatus for measuring a small gap using a Savart plate
US6184992B1 (en) * 1999-02-09 2001-02-06 Phase Metrics, Inc. Apparatus and method for measuring flying height and a real index of refraction
US6710881B1 (en) 1999-09-28 2004-03-23 Nanyang Technological University Heterodyne interferometry for small spacing measurement
US6624892B1 (en) 2000-06-01 2003-09-23 Seagate Technolgy Llc Method and apparatus for fly height testing using light emitting diodes
US6523414B1 (en) 2001-04-16 2003-02-25 Zevex, Inc. Optical pressure monitoring system
US6847452B2 (en) * 2001-08-02 2005-01-25 Zygo Corporation Passive zero shear interferometers
US6987569B2 (en) * 2001-08-23 2006-01-17 Zygo Corporation Dynamic interferometer controlling direction of input beam
US6912054B2 (en) * 2001-08-28 2005-06-28 Zygo Corporation Interferometric stage system
US6680811B2 (en) * 2001-10-09 2004-01-20 International Business Machines Corporation System and method for enhancing load/unload performance of low-flying heads in a disk drive
EP1446634A4 (en) * 2001-10-26 2010-04-07 Univ Rochester METHOD OF BIOMOLECULAR MEASUREMENT AND SYSTEM THEREFOR
AU2003215204A1 (en) * 2002-02-12 2003-09-04 Zygo Corporation Characterization and compensation of non-cyclic errors in interferometry systems
US7057739B2 (en) * 2002-02-12 2006-06-06 Zygo Corporation Separated beam multiple degree of freedom interferometer
US7262860B2 (en) * 2002-07-29 2007-08-28 Zygo Corporation Compensation for errors in off-axis interferometric measurements
US7321432B2 (en) * 2002-09-09 2008-01-22 Zygo Corporation Measurement and compensation of errors in interferometers
US7274462B2 (en) * 2002-09-09 2007-09-25 Zygo Corporation In SITU measurement and compensation of errors due to imperfections in interferometer optics in displacement measuring interferometry systems
AU2003297000A1 (en) * 2002-12-12 2004-06-30 Zygo Corporation In-process correction of stage mirror deformations during a photolithography exposure cycle
JP2007526450A (ja) * 2003-06-19 2007-09-13 ザイゴ　コーポレーション 平面ミラー干渉計測定システムにおけるビーム・ミスアライメントの幾何学的な影響に対する補償
US7327465B2 (en) * 2003-06-19 2008-02-05 Zygo Corporation Compensation for effects of beam misalignments in interferometer metrology systems
WO2005067579A2 (en) * 2004-01-06 2005-07-28 Zygo Corporation Multi-axis interferometers and methods and systems using multi-axis interferometers
US7310152B2 (en) * 2004-03-03 2007-12-18 Zygo Corporation Interferometer assemblies having reduced cyclic errors and system using the interferometer assemblies
US7305158B2 (en) * 2004-04-15 2007-12-04 Davidson Instruments Inc. Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a Fabry-Perot interferometer
US7492463B2 (en) * 2004-04-15 2009-02-17 Davidson Instruments Inc. Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor
US7280224B2 (en) * 2004-04-22 2007-10-09 Zygo Corporation Interferometry systems and methods of using interferometry systems
US7375823B2 (en) * 2004-04-22 2008-05-20 Zygo Corporation Interferometry systems and methods of using interferometry systems
US7298493B2 (en) 2004-06-30 2007-11-20 Zygo Corporation Interferometric optical assemblies and systems including interferometric optical assemblies
WO2006041984A2 (en) * 2004-10-06 2006-04-20 Zygo Corporation Error correction in interferometry systems
ATE466298T1 (de) * 2004-10-13 2010-05-15 Leica Geosystems Ag Verfahren und messgerät zur messung eines absolutdistanzwertes
EP1681540A1 (en) 2004-12-21 2006-07-19 Davidson Instruments, Inc. Multi-channel array processor
US7864329B2 (en) 2004-12-21 2011-01-04 Halliburton Energy Services, Inc. Fiber optic sensor system having circulators, Bragg gratings and couplers
WO2006101923A2 (en) 2005-03-16 2006-09-28 Davidson Instruments, Inc High intensity fabry-perot sensor
WO2006102234A2 (en) * 2005-03-18 2006-09-28 Zygo Corporation Multi-axis interferometer with procedure and data processing for mirror mapping
JP4869656B2 (ja) * 2005-08-08 2012-02-08 株式会社ミツトヨ 干渉計
WO2007033069A2 (en) 2005-09-13 2007-03-22 Davidson Instruments Inc. Tracking algorithm for linear array signal processor for fabry-perot cross-correlation pattern and method of using same
US7551294B2 (en) * 2005-09-16 2009-06-23 University Of Rochester System and method for brewster angle straddle interferometry
US7830528B2 (en) * 2005-12-14 2010-11-09 Koh Young Technology, Inc. 3D image measuring apparatus and method thereof
US7684051B2 (en) * 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
US7743661B2 (en) 2006-04-26 2010-06-29 Halliburton Energy Services, Inc. Fiber optic MEMS seismic sensor with mass supported by hinged beams
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
CA2676246C (en) 2007-01-24 2013-03-19 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters
WO2009100576A1 (en) * 2008-02-04 2009-08-20 Industrial Technology Research Institute Display system
JP5268425B2 (ja) * 2008-05-16 2013-08-21 キヤノン株式会社 表面形状測定装置及び露光装置
DE102011111900A1 (de) * 2011-08-30 2013-02-28 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferometrischen Abstandsbestimmung
EP2653884A1 (en) 2012-04-16 2013-10-23 Leica Geosystems AG Electro-optic distance-measuring device
DE102013221898A1 (de) * 2013-10-29 2015-04-30 Dr. Johannes Heidenhain Gmbh Vorrichtung zur Positionsbestimmung
CN106052561B (zh) 2016-08-05 2019-07-09 京东方科技集团股份有限公司 位置传感器以及包括其的运送装置和利用其进行位置修正的方法
US11262191B1 (en) 2018-07-12 2022-03-01 Onto Innovation Inc. On-axis dynamic interferometer and optical imaging systems employing the same
US12216051B2 (en) 2022-01-21 2025-02-04 Onto Innovation Inc. Dynamic phase-shift interferometer utilizing a synchronous optical frequency-shift
CN120112769A (zh) * 2022-11-15 2025-06-06 赛纳瑞科技有限公司 成像系统和方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3695767A (en) * 1970-11-18 1972-10-03 Burroughs Corp Apparatus for measuring magnetic head angle of a magnetic disc file
US3694088A (en) * 1971-01-25 1972-09-26 Bell Telephone Labor Inc Wavefront measurement
US3855625A (en) * 1973-12-19 1974-12-17 Ibm Magnetic head slider assembly
US4188122A (en) * 1978-03-27 1980-02-12 Rockwell International Corporation Interferometer
US4201473A (en) * 1978-04-21 1980-05-06 Zygo Corporation Optical interferometer system with CCTV camera for measuring a wide range of aperture sizes
US4225240A (en) * 1978-06-05 1980-09-30 Balasubramanian N Method and system for determining interferometric optical path length difference
DE2851750B1 (de) * 1978-11-30 1980-03-06 Ibm Deutschland Verfahren und Vorrichtung zur Messung der Ebenheit der Rauhigkeit oder des Kruemmungsradius einer Messflaeche
JPS56103303A (en) * 1980-01-21 1981-08-18 Hitachi Ltd Optical measuring method for micro-gap
US4325637A (en) * 1980-06-02 1982-04-20 Tropel, Inc. Phase modulation of grazing incidence interferometer

Also Published As

Publication number Publication date
EP0145836A3 (en) 1988-08-03
US4606638A (en) 1986-08-19
EP0145836A2 (en) 1985-06-26
JPS60123704A (ja) 1985-07-02

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